• 君临国际

    GK-150
    Full-automatic exposure machine
    Fully automatic design, it can place 4 input magazines and 4 output magazines at one time
    Double-station design, to meet the exposure and alignment of the film at the same time
    The table is equipped with an adaptive leveling function
    It can accurately control the bonding pressure between the mask and the chip
    Automatically and quickly complete the coarse alignment of the chip: the chip is aligned, the center of the chip is positioned, and the chip is trimmed
    Automatic alignment and positioning of wafers
    Multi-template matching to solve the problem of the same product but large color difference
    Accuracy of alignment is checked before exposure to ensure reliability
    Equipped with a temporary storage box for abnormal pieces to ensure the continuity of equipment operation
    Model Description

    It can be customized according to the process design requirements of diode chip manufacturers to meet the process processing needs of 4-, 5-, and 6-inch wafers for one, two, and three lithography on the same machine. Batch automation design, equipped with four input and output magazines; The double-station parallel meets the simultaneous operation of exposure and alignment.

    应用领域
    晶圆片接触式曝光
    产品特点
    全自动芯片曝光
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